Manufacturer: tyyModel: tytAnalog signals: 0-20mADigital signals: N2 FS Capability: 65 SCCM to 566 SCCSeals: kalrezFittings: 1/4 VCRConnector: card esgePressure: 100Temperature: 100Product code: 3101Product description
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Desired Full Scale Flow:
Gas Volume:
Gas List:
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1,1-Difluoro-1-Chloroethane / C2H3ClF 1,1-Difluoroethane / CH3CHF2 1,1-Difluoroethylene / CH2:CF2 1,2-Dichlorotetrafluoroethane / C2Cl2F4 1,3-Butadiene / C4H6 1-Butene / C4H8 2,2-Dimethylpropane / C(CH3)4 3-Methyl-1-butene / C5H10 Acetylene (Ethyne) / C2H2 Air / Mixture Allene / C3H4 Ammonia / NH3 Argon / Ar Arsine / AsH3 Boron Trichloride / BCl3 Boron Trifluoride / BF3 Bromotrifluoroethylene / C2BrF3 Bromotrifluoromethane / CBrF3 Butane / C4H10 Carbon Dioxide / CO2 Carbon Disulfide / CS2 Carbon Monoxide / CO Carbon Tetrafluoride / CF4 Carbonyl Fluoride / COF2 Carbonyl Sulfide / COS Chlorine / Cl2 Chlorine Dioxide / ClO2 Chlorine Trifluoride / ClF3 Chlorodifluoromethane / CHClF2 Chloropentafluoroethane / C2ClF5 Chlorotrifluoroethylene / C2ClF3 Chlorotrifluoromethane / CClF3 CIS-2-Butene / C4H8 Cyanogen / (CN)2 Cyanogen Chloride / ClCN Cyclobutane / C4H8 Cyclopropane / C3H6 Deuterium / D2 Deuterated Ammonia / ND3 Diborane / B2H6 Dichlorodifluoromethane / CCl2F2 Dichlorofluoromethane / CHCl2F Dichlorosilane / SiH2Cl2 Difluoromethane / CF2H2 Dimethylamine / (CH3)2N Dimethylether / (CH3)2O Disilane / Si2H6 Ethane / C2H6 Ethyl Chloride / C2H5Cl Ethylacetylene / C4H6 Ethylene / C2H4 Ethylene Oxide / C2H4O Fluorine / F2 Fluoroform / CHF3 Germane / GeH4 Helium / He Hexafluoro 1,3- Butadiene / C4F6 Hexafluoroacetone / C3F6O Hexafluoroethane / C2F6 Hexafluoropropylene (HFP) / C3F6 Hydrogen / H2 Hydrogen Bromide / HBr Hydrogen Chloride / HCl Hydrogen Fluoride / HF Hydrogen Iodide / HI Hydrogen Selenide / H2Se Hydrogen Sulfide / H2S Isobutane / C4H10 Isobutylene / C4H8 Krypton / Kr Methane (Natural Gas) / CH4 Methyl Bromide / CH3Br Methyl Chloride / CH3Cl Methyl Fluoride / CH3F Methyl Mercaptan / CH4S Methyl Vinyl Ether / C3H6O Methylacetylene / C3H4 Monoethylamine (CH3CH2NH2) / C2H7 Monomethylamine / CH3NH2 Neon / Ne Nitric Oxide / NO Nitrogen / N2 Nitrogen Trifluoride / NF3 Nitrogen Trioxide / N2O3 Nitrosyl Chloride / NOCl Nitrous Oxide / N2O Octofluorocyclobutane (LAM) / C4F8 Oxygen / O2 Oxygen Difluoride / OF2 Ozone / O3 Perchloryl Fluoride / ClO3F Perfluoro-2-Butene / C4F8 Perfluorobutane / C4F10 Perfluoromethyl-vinylether / MVE PMVE Perfluoropropane / C3F8 Phosgene / COCl2 Phosphine / PH3 Phosphorous Pentafluoride / PF5 Phosphorous Trifluoride / PF3 Propane (same as CH3CH2CH3) / C3H8 Propylene (Propene) / C3H6 Rhenium Hexafluoride / ReF6 Silane / SiH4 Silicon Tetrafluoride / SiF4 Sulfur Dioxide / SO2 Sulfur Hexafluoride / SF6 Sulfur Tetrafluoride / SF4 Sulfuryl Fluoride / SO2F2 Tetrachloromethane / CCl4 Tetrafluoroethylene (TFE) / C2F4 Tetrafluorohydrazine / N2F4 Trans-2-Butene / C4H8 Trichlorofluoromethane / CCl3F Trimethylamine / (CH3)3N Uranium Hexafluoride / UF6 Vinyl Bromide / C2H3Br Vinyl Chloride / C2H3Cl Vinyl Fluoride / C2H3F Xenon / Xe / Liquids at room temperature / 1,1,2-Trichloro-1,1,2-Triflour / C2Cl3F3 1,2-Dibromotetrafluoroethane / C2Br2F4 1,2-Dichloroethane (Ethylene Dichloride / C2H4Cl2 Bromine Pentafluoride / BrF5 Bromine Trifluoride / BrF3 Carbon Tetrachloride / CCl4 Chloroform (Trichloromethane) / CHCl3 Diboromodifluoromethane / B2 CBr2F2 Hexamethyldisilane (HMDS) / (CH2)6Si Hexane / C6H14 Hydrogen Cyanide / HCN Iodine Pentafluoride / IF5 Isopentane / C5H12 Nickel Carbonyl / Ni(CO)4 Nitrogen Dioxide / NO2 Pentane (n-Pentane) / C5H12 Silicon Tetrachloride / SiCl4 Trichlorosilane / SiHCl3 Trimethyloxyborane (TMB) / B(OCH3) TMPI / TMP / Tungsten Hexafluoride / WF6 Water Vapor / H2O / C5F8 3MS / 4MS / Si(CH3)(4) Hexafluoro 1,3- Butadiene / C4F6 / CH2FCF3 / Typical mixtures: / / 50% PH3 / 50% SiH4 / CH3 / Nitrogen Equivalent:
