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Gas Volume (SCCM)
Gas Type
— Select gas —
1,1-Difluoro-1-Chloroethane / C2H3ClF
1,1-Difluoroethane / CH3CHF2
1,1-Difluoroethylene / CH2:CF2
1,2-Dichlorotetrafluoroethane / C2Cl2F4
1,3-Butadiene / C4H6
1-Butene / C4H8
2,2-Dimethylpropane / C(CH3)4
3-Methyl-1-butene / C5H10
Acetylene (Ethyne) / C2H2
Air / Mixture
Allene / C3H4
Ammonia / NH3
Argon / Ar
Arsine / AsH3
Boron Trichloride / BCl3
Boron Trifluoride / BF3
Bromotrifluoroethylene / C2BrF3
Bromotrifluoromethane / CBrF3
Butane / C4H10
Carbon Dioxide / CO2
Carbon Disulfide / CS2
Carbon Monoxide / CO
Carbon Tetrafluoride / CF4
Carbonyl Fluoride / COF2
Carbonyl Sulfide / COS
Chlorine / Cl2
Chlorine Dioxide / ClO2
Chlorine Trifluoride / ClF3
Chlorodifluoromethane / CHClF2
Chloropentafluoroethane / C2ClF5
Chlorotrifluoroethylene / C2ClF3
Chlorotrifluoromethane / CClF3
CIS-2-Butene / C4H8
Cyanogen / (CN)2
Cyanogen Chloride / ClCN
Cyclobutane / C4H8
Cyclopropane / C3H6
Deuterium / D2
Deuterated Ammonia / ND3
Diborane / B2H6
Dichlorodifluoromethane / CCl2F2
Dichlorofluoromethane / CHCl2F
Dichlorosilane / SiH2Cl2
Difluoromethane / CF2H2
Dimethylamine / (CH3)2N
Dimethylether / (CH3)2O
Disilane / Si2H6
Ethane / C2H6
Ethyl Chloride / C2H5Cl
Ethylacetylene / C4H6
Ethylene / C2H4
Ethylene Oxide / C2H4O
Fluorine / F2
Fluoroform / CHF3
Germane / GeH4
Helium / He
Hexafluoro 1,3- Butadiene / C4F6
Hexafluoroacetone / C3F6O
Hexafluoroethane / C2F6
Hexafluoropropylene (HFP) / C3F6
Hydrogen / H2
Hydrogen Bromide / HBr
Hydrogen Chloride / HCl
Hydrogen Fluoride / HF
Hydrogen Iodide / HI
Hydrogen Selenide / H2Se
Hydrogen Sulfide / H2S
Isobutane / C4H10
Isobutylene / C4H8
Krypton / Kr
Methane (Natural Gas) / CH4
Methyl Bromide / CH3Br
Methyl Chloride / CH3Cl
Methyl Fluoride / CH3F
Methyl Mercaptan / CH4S
Methyl Vinyl Ether / C3H6O
Methylacetylene / C3H4
Monoethylamine (CH3CH2NH2) / C2H7
Monomethylamine / CH3NH2
Neon / Ne
Nitric Oxide / NO
Nitrogen / N2
Nitrogen Trifluoride / NF3
Nitrogen Trioxide / N2O3
Nitrosyl Chloride / NOCl
Nitrous Oxide / N2O
Octofluorocyclobutane (LAM) / C4F8
Oxygen / O2
Oxygen Difluoride / OF2
Ozone / O3
Perchloryl Fluoride / ClO3F
Perfluoro-2-Butene / C4F8
Perfluorobutane / C4F10
Perfluoromethyl-vinylether / MVE PMVE
Perfluoropropane / C3F8
Phosgene / COCl2
Phosphine / PH3
Phosphorous Pentafluoride / PF5
Phosphorous Trifluoride / PF3
Propane (same as CH3CH2CH3) / C3H8
Propylene (Propene) / C3H6
Rhenium Hexafluoride / ReF6
Silane / SiH4
Silicon Tetrafluoride / SiF4
Sulfur Dioxide / SO2
Sulfur Hexafluoride / SF6
Sulfur Tetrafluoride / SF4
Sulfuryl Fluoride / SO2F2
Tetrachloromethane / CCl4
Tetrafluoroethylene (TFE) / C2F4
Tetrafluorohydrazine / N2F4
Trans-2-Butene / C4H8
Trichlorofluoromethane / CCl3F
Trimethylamine / (CH3)3N
Uranium Hexafluoride / UF6
Vinyl Bromide / C2H3Br
Vinyl Chloride / C2H3Cl
Vinyl Fluoride / C2H3F
Xenon / Xe
/
Liquids at room temperature /
1,1,2-Trichloro-1,1,2-Triflour / C2Cl3F3
1,2-Dibromotetrafluoroethane / C2Br2F4
1,2-Dichloroethane (Ethylene Dichloride / C2H4Cl2
Bromine Pentafluoride / BrF5
Bromine Trifluoride / BrF3
Carbon Tetrachloride / CCl4
Chloroform (Trichloromethane) / CHCl3
Diboromodifluoromethane / B2 CBr2F2
Hexamethyldisilane (HMDS) / (CH2)6Si
Hexane / C6H14
Hydrogen Cyanide / HCN
Iodine Pentafluoride / IF5
Isopentane / C5H12
Nickel Carbonyl / Ni(CO)4
Nitrogen Dioxide / NO2
Pentane (n-Pentane) / C5H12
Silicon Tetrachloride / SiCl4
Trichlorosilane / SiHCl3
Trimethyloxyborane (TMB) / B(OCH3)
TMPI /
TMP /
Tungsten Hexafluoride / WF6
Water Vapor / H2O
/ C5F8
3MS /
4MS / Si(CH3)(4)
Hexafluoro 1,3- Butadiene / C4F6
/ CH2FCF3
/
Typical mixtures: /
/
50% PH3 / 50% SiH4 /
CH3 /
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